Competition and Cooperation between Fluorine and Oxygen in SnO2:F Films

The interaction of oxygen and fluorine (F&O) in an F-doped SnO2 film, prepared by regulating partial pressure the content doped from 2.5 at% to 10 at%, was investigated large perspective through characterization methods including XRD, Raman spectroscopy, photoluminescence wettability measurement a Hall effect test system. results show that F&O’s competitive cooperative relationship would be reflected structure electrical characteristics films. action is overwhelming restricts fluorine, so growing number F atoms occupy position order co-edge tin–oxygen octahedron chains > vacancies segregation, which leads carrier concentration modestly increasing ~1015 ~1017/cm−3. As inadequate restrain more are likely enter lattice solid-solution way replace O at chains, causing dramatic increase ~1016 ~1019/cm−3. Furthermore, continuing weaken action, only could bring about augment ~1016/cm−3 ~1018/cm−3, then going up ~1021/cm−3 post-annealing. However, impairment contributes effective doping on film. Such mutual between provides direction for highly efficient production tunable regulation film demand.